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NITROGEN TRIFLUORIDE Chemical compatibility with O-rings, rubbers, & plastics

Nitrogen trifluoride (NF3) is a colorless, non-flammable gas used primarily in the electronics industry for cleaning and etching semiconductor wafers. It is a potent greenhouse gas, and its use is carefully regulated. Nitrogen trifluoride is also used in the production of certain chemicals and as an oxidizing agent. Proper handling and storage of nitrogen trifluoride are essential to prevent exposure and environmental impact. Safety measures should include the use of personal protective equipment, proper ventilation, and adherence to strict regulatory guidelines. Regular monitoring and maintenance of systems using nitrogen trifluoride ensure optimal performance and safety, making it a critical component in semiconductor manufacturing while mitigating its environmental footprint.

Need NITROGEN TRIFLUORIDE resistant plastics, O-rings, rubbers, and seals? Get in touch now!


Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

Paint covered o-ring
MaterialPerformanceGet a quote
FFKM (CanRez™, Kalrez®, Chemraz®)Acceptable: <15-25% SwellingGet a quote
FKM ETP (Viton® Extreme)Acceptable: <15-25% SwellingGet a quote
FKM (Viton®)--- Insufficient Testing DataGet a quote
NBR (Buna-N, Nitrile)--- Insufficient Testing DataGet a quote
HNBR (Hydrogenated Nitrile)--- Insufficient Testing DataGet a quote
EPDM (Ethylene Propylene)--- Insufficient Testing DataGet a quote
Aflas® (TFE/P, FEPM)--- Insufficient Testing DataGet a quote
Silicone (VMQ, PVMQ)--- Insufficient Testing DataGet a quote
Fluorosilicone (FVMQ)--- Insufficient Testing DataGet a quote
Polyurethane (PU, AU)--- Insufficient Testing DataGet a quote
Teflon® (PTFE)--- Insufficient Testing DataGet a quote
Neoprene (Chloroprene)--- Insufficient Testing DataGet a quote
SBR (Styrene-Butadiene)--- Insufficient Testing DataGet a quote
ACM (Acrylic Rubber)--- Insufficient Testing DataGet a quote
Butyl (IIR, Isobutylene Isoprene)--- Insufficient Testing DataGet a quote
Butadiene Rubber (BR)--- Insufficient Testing DataGet a quote
Isoprene Rubber (Polyisoprene)--- Insufficient Testing DataGet a quote
Natural Rubber (NR)--- Insufficient Testing DataGet a quote
Hypalon (CSPE)--- Insufficient Testing DataGet a quote
Metal Piston

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