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PHOSPHORUS OXYCHLORIDE Chemical compatibility with O-rings, rubbers, & plastics

Phosphorous oxychloride (POCl3) is a colorless, fuming liquid with a pungent odor, used primarily in the manufacture of phosphate esters, which are used as flame retardants, plasticizers, and hydraulic fluids. It is also employed in the semiconductor industry for doping silicon wafers. POCl3 is highly reactive and corrosive, posing significant health hazards upon contact, inhalation, or ingestion. It can cause severe burns, respiratory damage, and systemic toxicity. Proper handling requires the use of protective equipment, including gloves, goggles, and face shields, as well as appropriate ventilation and fume extraction systems. Storage should be in corrosion-resistant containers, away from moisture and incompatible substances like strong bases and reducing agents. In case of spills, neutralization and prompt cleanup are essential to prevent environmental and health hazards. Due to its reactivity and toxicity, strict safety protocols must be followed when working with POCl3.

Need PHOSPHORUS OXYCHLORIDE resistant plastics, O-rings, rubbers, and seals? Get in touch now!


Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

Paint covered o-ring
MaterialPerformanceGet a quote
FFKM (CanRez™, Kalrez®, Chemraz®)Excellent: <15% SwellingGet a quote
FKM ETP (Viton® Extreme)Excellent: <15% SwellingGet a quote
FKM (Viton®)--- Insufficient Testing DataGet a quote
NBR (Buna-N, Nitrile)--- Insufficient Testing DataGet a quote
HNBR (Hydrogenated Nitrile)--- Insufficient Testing DataGet a quote
EPDM (Ethylene Propylene)--- Insufficient Testing DataGet a quote
Aflas® (TFE/P, FEPM)--- Insufficient Testing DataGet a quote
Silicone (VMQ, PVMQ)--- Insufficient Testing DataGet a quote
Fluorosilicone (FVMQ)--- Insufficient Testing DataGet a quote
Polyurethane (PU, AU)--- Insufficient Testing DataGet a quote
Teflon® (PTFE)--- Insufficient Testing DataGet a quote
Neoprene (Chloroprene)--- Insufficient Testing DataGet a quote
SBR (Styrene-Butadiene)--- Insufficient Testing DataGet a quote
ACM (Acrylic Rubber)--- Insufficient Testing DataGet a quote
Butyl (IIR, Isobutylene Isoprene)--- Insufficient Testing DataGet a quote
Butadiene Rubber (BR)--- Insufficient Testing DataGet a quote
Isoprene Rubber (Polyisoprene)--- Insufficient Testing DataGet a quote
Natural Rubber (NR)--- Insufficient Testing DataGet a quote
Hypalon (CSPE)--- Insufficient Testing DataGet a quote
Metal Piston

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