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HEXAFLUOROETHANE (F-116) Chemical compatibility with O-rings, rubbers, & plastics

Hexafluoroethane, also known as F-116, shares the same chemical formula (C2F6) and properties as hexafluoroethane. It is used predominantly in the electronics industry for plasma etching in semiconductor fabrication. F-116 is a potent greenhouse gas with a long atmospheric lifetime, contributing to global warming if released. Its non-flammable and chemically inert nature makes it ideal for high-precision applications where reactivity is undesirable. Safety measures should include adequate ventilation and monitoring of gas concentrations to prevent asphyxiation hazards. Proper containment and handling protocols are crucial to minimize environmental impact and ensure workplace safety. The application of F-116 in critical technological processes highlights its importance, although its environmental impact necessitates careful management and potential exploration of alternatives to mitigate its greenhouse gas emissions.

Need HEXAFLUOROETHANE (F-116) resistant plastics, O-rings, rubbers, and seals? Get in touch now!


Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

Paint covered o-ring
MaterialPerformanceGet a quote
FFKM (CanRez™, Kalrez®, Chemraz®)Acceptable: <15-25% SwellingGet a quote
FKM ETP (Viton® Extreme)Acceptable: <15-25% SwellingGet a quote
FKM (Viton®)--- Insufficient Testing DataGet a quote
NBR (Buna-N, Nitrile)--- Insufficient Testing DataGet a quote
HNBR (Hydrogenated Nitrile)--- Insufficient Testing DataGet a quote
EPDM (Ethylene Propylene)--- Insufficient Testing DataGet a quote
Aflas® (TFE/P, FEPM)--- Insufficient Testing DataGet a quote
Silicone (VMQ, PVMQ)--- Insufficient Testing DataGet a quote
Fluorosilicone (FVMQ)--- Insufficient Testing DataGet a quote
Polyurethane (PU, AU)--- Insufficient Testing DataGet a quote
Teflon® (PTFE)--- Insufficient Testing DataGet a quote
Neoprene (Chloroprene)--- Insufficient Testing DataGet a quote
SBR (Styrene-Butadiene)--- Insufficient Testing DataGet a quote
ACM (Acrylic Rubber)--- Insufficient Testing DataGet a quote
Butyl (IIR, Isobutylene Isoprene)--- Insufficient Testing DataGet a quote
Butadiene Rubber (BR)--- Insufficient Testing DataGet a quote
Isoprene Rubber (Polyisoprene)--- Insufficient Testing DataGet a quote
Natural Rubber (NR)--- Insufficient Testing DataGet a quote
Hypalon (CSPE)--- Insufficient Testing DataGet a quote
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