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TRICHLOROSILANE Chemical compatibility with O-rings, rubbers, & plastics

Trichlorosilane is a colorless, fuming liquid with the chemical formula HSiCl3, used primarily as an intermediate in the production of high-purity silicon and various organosilicon compounds. It is employed in various industrial and chemical applications, including the manufacturing of semiconductors, silicones, and specialty chemicals. Trichlorosilane is highly reactive and requires proper handling and storage to prevent accidents and ensure safety. It can pose health risks if inhaled or ingested and may cause severe skin and eye irritation. Safety measures, including the use of appropriate protective equipment and adherence to handling protocols, are crucial when working with trichlorosilane. Its effectiveness as an intermediate and its unique properties make trichlorosilane a valuable chemical in numerous industrial and chemical applications, contributing to the synthesis and production of a wide range of products and materials.

Need TRICHLOROSILANE resistant plastics, O-rings, rubbers, and seals? Get in touch now!


Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

Paint covered o-ring
MaterialPerformanceGet a quote
FFKM (CanRez™, Kalrez®, Chemraz®)Excellent: <15% SwellingGet a quote
FKM ETP (Viton® Extreme)Excellent: <15% SwellingGet a quote
FKM (Viton®)Excellent: <15% SwellingGet a quote
NBR (Buna-N, Nitrile)Not Recommended: Over 40% SwellingGet a quote
HNBR (Hydrogenated Nitrile)Not Recommended: Over 40% SwellingGet a quote
EPDM (Ethylene Propylene)Not Recommended: Over 40% SwellingGet a quote
Aflas® (TFE/P, FEPM)--- Insufficient Testing DataGet a quote
Silicone (VMQ, PVMQ)Not Recommended: Over 40% SwellingGet a quote
Fluorosilicone (FVMQ)Acceptable: <15-25% SwellingGet a quote
Polyurethane (PU, AU)Not Recommended: Over 40% SwellingGet a quote
Teflon® (PTFE)--- Insufficient Testing DataGet a quote
Neoprene (Chloroprene)Not Recommended: Over 40% SwellingGet a quote
SBR (Styrene-Butadiene)Not Recommended: Over 40% SwellingGet a quote
ACM (Acrylic Rubber)Not Recommended: Over 40% SwellingGet a quote
Butyl (IIR, Isobutylene Isoprene)Not Recommended: Over 40% SwellingGet a quote
Butadiene Rubber (BR)Not Recommended: Over 40% SwellingGet a quote
Isoprene Rubber (Polyisoprene)Not Recommended: Over 40% SwellingGet a quote
Natural Rubber (NR)Not Recommended: Over 40% SwellingGet a quote
Hypalon (CSPE)Not Recommended: Over 40% SwellingGet a quote
Metal Piston

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