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TUNGSTEN HEXAFLUORIDE Chemical compatibility with O-rings, rubbers, & plastics

Tungsten hexafluoride (WF6) is a colorless, highly corrosive gas used primarily in the semiconductor industry for chemical vapor deposition (CVD) processes. It is employed in the production of tungsten films, providing excellent electrical conductivity and resistance to high temperatures. Tungsten hexafluoride is also used in the manufacture of certain types of electronic components and as a fluorinating agent in chemical synthesis. Proper handling and storage of tungsten hexafluoride are essential to maintain its quality and prevent accidents, as it can pose severe health risks if inhaled or ingested and may cause corrosion of equipment. Safety measures, including the use of appropriate protective equipment and adherence to handling protocols, are crucial when working with tungsten hexafluoride. Its effectiveness in CVD processes and its unique properties make tungsten hexafluoride a valuable chemical in the semiconductor and electronics industries.

Need TUNGSTEN HEXAFLUORIDE resistant plastics, O-rings, rubbers, and seals? Get in touch now!


Canyon Components strives to meet all customer service requests. If you need something that isn't listed below, feel free to contact a Canyon Components product and application consultant and let our knowledgeable staff help you design the perfect part for your needs.

Paint covered o-ring
MaterialPerformanceGet a quote
FFKM (CanRez™, Kalrez®, Chemraz®)Acceptable: <15-25% SwellingGet a quote
FKM ETP (Viton® Extreme)Acceptable: <15-25% SwellingGet a quote
FKM (Viton®)--- Insufficient Testing DataGet a quote
NBR (Buna-N, Nitrile)--- Insufficient Testing DataGet a quote
HNBR (Hydrogenated Nitrile)--- Insufficient Testing DataGet a quote
EPDM (Ethylene Propylene)--- Insufficient Testing DataGet a quote
Aflas® (TFE/P, FEPM)--- Insufficient Testing DataGet a quote
Silicone (VMQ, PVMQ)--- Insufficient Testing DataGet a quote
Fluorosilicone (FVMQ)--- Insufficient Testing DataGet a quote
Polyurethane (PU, AU)--- Insufficient Testing DataGet a quote
Teflon® (PTFE)--- Insufficient Testing DataGet a quote
Neoprene (Chloroprene)--- Insufficient Testing DataGet a quote
SBR (Styrene-Butadiene)--- Insufficient Testing DataGet a quote
ACM (Acrylic Rubber)--- Insufficient Testing DataGet a quote
Butyl (IIR, Isobutylene Isoprene)--- Insufficient Testing DataGet a quote
Butadiene Rubber (BR)--- Insufficient Testing DataGet a quote
Isoprene Rubber (Polyisoprene)--- Insufficient Testing DataGet a quote
Natural Rubber (NR)--- Insufficient Testing DataGet a quote
Hypalon (CSPE)--- Insufficient Testing DataGet a quote
Metal Piston

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